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X Axis Fine Piezo Stages high stiffness type

Nanometer resolution high stiffness flexure stages.

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SFS-H40X(CL) SFS-H40Z(CL) SFS-H60X(CL) SFS-H60XY(CL) 
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Part Number

PDF

3D

Technical Data

Extend

SFS-H

SFS-H.pdf

 

 

FPS-H

  FPS-H.pdf  

 

 


 

 
         


   


   

     


 

 
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