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X Axis Nano Long Travel Automatic Stage

In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution
is achieved by feedback control using position information of encoder.


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1nm FS-UPX_FC-911 5nm FS-SPX_FC-611 10nm PS-PX_FC-511_FC-514 Sub micron FS-X_FC-411_FC-414 JC-01_F-CABLE Jog 
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  Part Number   PDF     Part Number   PDF

  FS-UPX_FC-911

FS-UPX_FC-911        
  FS-SPX_FC-611 FS-SPX_FC-611        
  PSPX_FC-511_FC-514 PSPX_FC-511_FC-514        
  FS-X_FC-411_FC-414 FS-X_FC-411_FC-414        
  High Resolution Feedback Stage  NFS .pdf        
         
         
         
         
         
         
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