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Z Axis Nano-scale Large-Range Platform
With Industrial Line positioners, attocube has genuinely combined highest precision piezodrive technology with extremely rugged, yet cost effective design.
◦All ECS positioners of the Industrial Line are dedicated for operation at ambient temperature and depending on the model for pressures ranging from atmospheric to UHV.
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Part Number |
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3D |
Technical Data |
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| ECSz3030 |  ECSz3030Al_NUM_RT | |||
| ECSz5050 | ECSz5050.pdf |
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