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Precis 200
The all-new Precis® 200 incorporates the most advanced design and technology from VIEW-MM. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable.
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• Extended Z-axis range – 2.5mm, 5mm or 100mm
• Transmitted illumination
• Integral electronics drawer – fully compliant with SEMI S2 and CE standards
• Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
• Fully automated microscope with all settings computer controlled
• Megapixel camera for optimum resolution
• VIEW Metrology Software (VMS™) allows a wide range of components to be measured, with the option of CAD translation and full geometric dimensioning and tolerancing.
• MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.
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