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X Axis Nano Long Travel Automatic Stage
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution
is achieved by feedback control using position information of encoder.
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- Technical Data
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1nm FS-UPX_FC-911 5nm FS-SPX_FC-611 10nm PS-PX_FC-511_FC-514 Sub micron FS-X_FC-411_FC-414 JC-01_F-CABLE Jog
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| Part Number | Part Number | |||
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FS-UPX_FC-911 |
 FS-UPX_FC-911 |
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| FS-SPX_FC-611 | FS-SPX_FC-611 |
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| PSPX_FC-511_FC-514 | PSPX_FC-511_FC-514 |
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| FS-X_FC-411_FC-414 | FS-X_FC-411_FC-414 |
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| High Resolution Feedback Stage |  NFS .pdf |
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