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Z Axis Fine Piezo Stages high stiffness type
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SFS-H40X(CL) SFS-H40Z(CL) SFS-H60X(CL) SFS-H60XY(CL)SFS-H60Z(CL) SFS-H60XYZ(CL) SFS-120XY(WA)SFS-OBL-1 SFS-OBL-2 SFAI-OBL-1ROBL-ADP-M20.32AOBL-ADP-M20.32BOBL-ADP-M25.0AOBL-ADP-M25.0BOBL-ADP-M26.0AOBL-ADP-M26.0BOBL-ADP3-M20.32AOBL-ADP3-M20.32BOBL-ADP3-M25.0AOBL-ADP3-M25.0BOBL-ADP3-M26.0AOBL-ADP3-M26.0B
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Part Number | 3D | Technical Data | Extend | |
SFS-H |
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SFS-120XY(WA) |
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SFS-OBL/SFAI-OBL |
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FPS-H |  FPS-H.pdf |  | ||
FPS-120XY(WA) | FPS-120XY(WA) |  | ||
FPS-OBL/FPS-OBL-R | FPS-OBL (Upright)FPS-OBL-R (Inverted) |  | ||
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